Nikon Nexiv Vmr 3020 Manual

  1. Geared for ultra-wide measuring applications, the NEXIV VMR-10080 can handle large flat panels, shadow masks, etching sheets for lead frames, LCDs, mask patterns, and other large workpieces. Among its many features is a 1000 x 800 x 150 mm stage stroke, bright diascopic illumination, pinpoint laser autofocusing, and advanced search functions.
  2. A high resolution lens system featuring large 300mm range and laser height measurements. An ideal general purpose 3D coordinate measuring system with 300 x 200 x 150mm stage travel, the NEXIV-3020 handles a variety of measurement tasks including those for mechanical parts, molded parts, stamped parts and various other workpieces.
Nikon Updated: 2007-06-20

Nikon's NEXIV VMR-1515 is an automated small-size CNC non-contact measuring instrument featuring TTL Laser height/profile scanning, intelligent pattern recognition and low contrast edge measuring. Geared for smaller parts, it features smaller travel (X, Y, Z) of 150 x 150 x 150mm.

Nikon Nexiv Vmr 3020 Manual

Provides all dimensional measurements required for wafer carrier fabrication including control of deformation due to aging of wafers and wafer carriers.

The NEXIV VM-450C - designed for use with 300mm Front Opening Unified Pod (FOUP) & Front Opening Shipping Box (FOSB) wafer carriers - detects hard to see edges using a variety of illumination features as well as Nikon's unique image processing technologies. By incorporating laser AF that provides quick non-contact focusing, even on transparent surfaces and on the edge of the peripheries of the wafer, the VM-450C is able to measure SEMI-standard dimensions with excellent accuracy.


• Four side planes of the carrier are continuously measured by rotating the kinematic plate in 90° increments

• SEMI-compliant kinematic plate provides perfect X,Y,Z coordinates

• Variety of illumination choices facilitate accurate measurements of registration pin holes and latch-key holes

• Laser AF provides fast, non-contact measurements of wafer positions

• Wide area, high-intensity LED illumination enables accurate measurements of wafer heights

• 300mm, 200mm wafer carrier and SMIF Pod base

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Nikon NEXIV VMR-1515 CNC Video Measuring System

A ground-breaking multifunctional video measuring system developed on the strength of Nikon’s leading optomechatronics technology.

Incorporates confocal technology, brightfield with a 15X zoom, and Laser AF. No matter what geometrical measurements are needed, two-dimensional or three-dimensional, inspection and evaluation is exceptionally fast and accurate.

The Confocal NEXIV can be optimally used for measurements of a variety of bump heights on advanced IC packages, such as wafer-level CSP, as well as for the inspection of highly complicated structures of MEMS and probe card.

Nikon Nexiv Vmr 3020 Manual


Nikon Nexiv Vmr 3020 Manual
  • Simultaneous wide-area height measurements with Nikon proprietary confocal optics
  • 2D measurement with 15x brightfield zoom optics
  • Fully compatible with 300 mm wafer measurement at semiconductor fabs


Nikon Nexiv Vmr 3020 Manual
  • IC Packages
    • Flip Chip/COF(Bump)/COG
    • CSP (FBGA)/SIP (Bump, Wire)
    • Interposer (Pad height)
  • MEMS
  • Probe Card (Silicon Probe, Au Probe)
  • Precise Glass Components (Micro Lens, Contact Lens)
  • Photo Spacer Width/Height for Color Filter for FPD Panel

Nikon Vmr

Measurement Examples

NEXIV Confocal Series

Nikon Nexiv Vmr 3020 Manual User

Nikon vmr

Nikon Nexiv Vmr 3020 Manual Driver

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